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Author
Van Zant, Peter.
Title
Microchip fabrication : a practical guide to semiconductor processing / Peter Van Zant.
Imprint
New York, N.Y. : McGraw-Hill, c1997.
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Location
Call No.
OPAC Message
Status
Axe 2nd Floor Stacks
621.38152 V395m 1997
---
Available
Edition
3rd ed.
Description
xvi, 623 p. : ill. ; 24 cm.
Bibliography
Includes bibliographical references and index.
Subject
Semiconductors -- Design and construction.
ISBN
0070672504 (hardcover)
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