| Description |
1 online resource (1 volume) |
|
text txt rdacontent |
|
computer c rdamedia |
|
online resource cr rdacarrier |
| Series |
Micro and nano technologies series |
|
Micro & nano technologies.
|
| Summary |
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R & D groups. Written by a single author, this book provides a clear, coherently-written guide to this important emerging technology. Covers materials, fabrication and applications in one book. |
| Contents |
Integration and applications -- Routes to thick films -- Thick film deposition techniques -- Microstructure-property relationships -- Pattering and structuring -- Houston, we have a problem: Thick film troubleshooting -- Recipes and techniques. |
| Note |
Print version record. |
| Bibliography |
Includes bibliographical references (pages 183-185) and index. |
| Subject |
Thick-film circuits -- Design and construction.
|
|
Microelectromechanical systems -- Design and construction.
|
|
Nanoelectronics.
|
|
Nanoélectronique.
|
|
Microelectromechanical systems -- Design and construction
|
|
Nanoelectronics
|
| Other Form: |
Print version: Dorey, Robert A. Ceramic thick films for MEMS and microdevices. Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2011 9781437778175 (OCoLC)751752964 |
| ISBN |
9781437778182 (electronic bk.) |
|
1437778186 (electronic bk.) |
|
9781437778175 (electronic bk.) |
|
1437778178 (electronic bk.) |
|
1283293773 |
|
9781283293778 |
| Standard No. |
9786613293770 |
|
AU@ 000048718245 |
|
AU@ 000052282517 |
|
DEBBG BV039830336 |
|
DEBBG BV041776399 |
|
DEBBG BV042316751 |
|
DEBSZ 404318398 |
|
