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Title
MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al.
Imprint
Boston : Artech House, c2004.
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Available to Pittsburg State University patrons only.
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Call No.
OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Description
x, 269 p. : ill.
Series
Artech House microelectromechanical systems (MEMS) series
Microelectromechanical systems series.
Bibliography
Includes bibliographical references and index.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject
Microelectromechanical systems.
Detectors.
Genre/Form
Electronic books.
Added Author
Beeby, Stephen.
ProQuest (Firm)
ISBN
1580538738
1580535364 (alk. paper)
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