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Title
Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand [and three others].
Publication Info.
Weinheim, Baden-Wurttemberg, Germany : Wiley-VCH, 2015.
2015
Connect to
Available to Pittsburg State University patrons only.
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Location
Call No.
OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Description
1 online resource (512 pages) : illustrations (some color), graphs.
text rdacontent
computer rdamedia
online resource rdacarrier
Series
Advanced Micro & Nanosystems
Advanced micro & nanosystems.
Bibliography
Includes bibliographical references at the end of each chapters and index.
Note
Description based on online resource; title from PDF title page (ebrary, viewed May 21, 2015).
Subject
Microelectromechanical systems -- Design and construction.
Microfabrication.
Resonance.
Genre/Form
Electronic books.
Added Author
Brand, Oliver, editor.
Other Form:
Print version: Resonant MEMS : fundamentals, implementation and application. Weinheim, Baden-Wurttemberg, Germany : Wiley-VCH, c2015 xxv, 483 pages Advanced micro & nanosystems. 9783527335459
ISBN
9783527335459
9783527676361 (electronic bk.)
Available items only
