Description |
1 online resource (xv, 335 pages) : illustrations |
|
text txt rdacontent |
|
computer c rdamedia |
|
online resource cr rdacarrier |
Summary |
This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope (NSOM) is also given. The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology. A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes. Key Features * Provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers * Explains many practical applications of scanning optical and interference microscopy in such diverse fields as biology and semiconductor metrology * Discusses in theoretical terms the origin of the improved depth and transverse resolution of scanning optical and interference microscopes with emphasis on the practical results of the theoretical calculations * Considers the practical aspects of building a confocal scanning or interference microscope and explores some of the design tradeoffs made for microscopes used in various applications * Discusses the theory and design of near-field optical microscopes * Explains phase imaging in the scanning optical and interference microscopes. |
Contents |
Introduction. Instruments. Depth and Transverse Resolution. Phase Imaging. Applications. Appendix A: Vector Field Theory for Depth and Transverse Resolution of a CSOM. |
Bibliography |
Includes bibliographical references and index. |
Note |
Print version record. |
Subject |
Confocal microscopy.
|
|
Imaging systems.
|
|
Microscopie confocale.
|
|
Imagerie (Technique)
|
|
SCIENCE -- Microscopes & Microscopy.
|
|
Confocal microscopy
|
|
Imaging systems
|
Indexed Term |
Microscopy |
Added Author |
Kino, Gordon S.
|
Other Form: |
Print version: Corle, Timothy R. Confocal scanning optical microscopy and related imaging systems. San Diego : Academic Press, ©1996 0124087507 9780124087507 (DLC) 96001999 (OCoLC)34191610 |
ISBN |
9780124087507 |
|
0124087507 |
|
9780080529783 (electronic bk.) |
|
008052978X (electronic bk.) |
|
1281046698 |
|
9781281046697 |
Standard No. |
AU@ 000050347770 |
|
AU@ 000051561166 |
|
CHNEW 001005250 |
|
DEBBG BV039830537 |
|
DEBBG BV040903321 |
|
DEBBG BV042315514 |
|
DEBBG BV043044908 |
|
DEBSZ 378276263 |
|
DEBSZ 381393828 |
|
DEBSZ 405295170 |
|
DEBSZ 422176354 |
|
GBVCP 785364943 |
|
NZ1 12432453 |
|
NZ1 15190995 |
|