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Author
El-Kareh, Badih.
Title
Fundamentals of semiconductor processing technology / by Badih El-Kareh ; graphics and layout, Richard J. Bombard.
Imprint
Boston, Mass. : Kluwer Academic Publishers, c1995.
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Location
Call No.
OPAC Message
Status
Axe 2nd Floor Stacks
621.38152 El51f
---
Available
Description
xii, 599 p. : ill. ; 25 cm.
Note
Cover title: Fundamentals of semiconductor processing technologies.
Bibliography
Includes bibliographical references and index.
Subject
Semiconductors -- Design and construction.
Manufacturing processes.
Added Title
Fundamentals of semiconductor processing technologies.
ISBN
0792395344 (acid-free paper)
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