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Title CMOS-MEMS / volume editors: O. Brand and G.K. Fedder.

Imprint Weinheim ; [Great Britain] : Wiley-VCH, c2005.


Location Call No. OPAC Message Status
 Axe 2nd Floor Stacks  621.3815 C629 2005    ---  Available
Description xiv, 594 p. : ill. ; 25 cm.
Series Advanced micro & nanosystems ; v. 2
Bibliography Includes bibliographical references and index.
Subject Metal oxide semiconductors, Complementary.
Microelectromechanical systems.
Added Author Brand, Oliver, 1964-
Fedder, G. K. (Gary K.)
ISBN 3527310800
Standard No. 9783527310807

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