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Title
CMOS-MEMS / volume editors: O. Brand and G.K. Fedder.
Imprint
Weinheim ; [Great Britain] : Wiley-VCH, c2005.
Copies
Location
Call No.
OPAC Message
Status
Axe 2nd Floor Stacks
621.3815 C629 2005
---
Available
Description
xiv, 594 p. : ill. ; 25 cm.
Series
Advanced micro & nanosystems ; v. 2
Bibliography
Includes bibliographical references and index.
Subject
Metal oxide semiconductors, Complementary.
Microelectromechanical systems.
Added Author
Brand, Oliver, 1964-
Fedder, G. K. (Gary K.)
ISBN
3527310800
Standard No.
9783527310807
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