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Title Nanolithography : the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems / edited by Martin Feldman.

Publication Info. Oxford : Woodhead Publishing, 2014.

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Location Call No. OPAC Message Status
 Axe Elsevier ScienceDirect Ebook  Electronic Book    ---  Available
Description 1 online resource (1 volume)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Series Woodhead Publishing series in electronic and optical materials
Woodhead Publishing series in electronic and optical materials.
Note Previously issued in print: 2013.
CIP data; resource not viewed.
Bibliography Includes bibliographical references and index.
Summary Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. The goal of this book is to give enough background information to enable researchers to understand and appreciate new developments in nanolithography, and to go on to make advances of his/her own. Topics include: current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions; lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography; emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics. -- Edited summary from book.
Subject Nanolithography.
Nanolithographie.
Nanolithography
Added Author Feldman, Martin, editor.
Other Form: Print version 9780857095008
ISBN 9780857098757 (PDF ebook)
0857098756 (PDF ebook)
9780857095008
Standard No. AU@ 000061146200
CHBIS 010295180
CHVBK 32776516X
DEBBG BV042300144
DEBSZ 400099713
DEBSZ 403351820

 
    
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