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Title
Handbook of 3D integration. Volume 3, 3D process technology / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.
Publication Info.
Weinheim, Germany : Wiley-VCH, 2014.
2014
Connect to
Available to Pittsburg State University patrons only.
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Location
Call No.
OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Description
1 online resource (475 pages) : illustrations (some color)
text rdacontent
computer rdamedia
online resource rdacarrier
Bibliography
Includes bibliographical references at the end of each chapters and index.
Note
Description based on online resource; title from PDF title page (ebrary, viewed May 5, 2014).
Subject
Integrated circuits.
Integrated circuits -- Design and construction.
Silicon.
Three-dimensional imaging.
Genre/Form
Electronic books.
Added Author
Garrou, Philip, editor.
Koyanagi, Mitsumasa, editor.
Ramm, Peter, editor.
Allen, Ricky, contributor.
Other Form:
Print version: Handbook of 3D integration. Volume 3, 3D process technology. Weinheim, Germany : Wiley-VCH, c2014 xxii, 451 pages 9783527334667
ISBN
9783527334667
9783527670130 (electronic bk.)
9783527670123 (electronic bk.)
9783527670116 (electronic bk.)
9783527670109 (electronic bk.)
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