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Title Handbook of 3D integration. Volume 3, 3D process technology / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.

Publication Info. Weinheim, Germany : Wiley-VCH, 2014.


Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description 1 online resource (475 pages) : illustrations (some color)
text rdacontent
computer rdamedia
online resource rdacarrier
Bibliography Includes bibliographical references at the end of each chapters and index.
Note Description based on online resource; title from PDF title page (ebrary, viewed May 5, 2014).
Subject Integrated circuits.
Integrated circuits -- Design and construction.
Three-dimensional imaging.
Genre/Form Electronic books.
Added Author Garrou, Philip, editor.
Koyanagi, Mitsumasa, editor.
Ramm, Peter, editor.
Allen, Ricky, contributor.
Other Form: Print version: Handbook of 3D integration. Volume 3, 3D process technology. Weinheim, Germany : Wiley-VCH, c2014 xxii, 451 pages 9783527334667
ISBN 9783527334667
9783527670130 (electronic bk.)
9783527670123 (electronic bk.)
9783527670116 (electronic bk.)
9783527670109 (electronic bk.)

Available items only