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Print Material
Author Herman, Irving P.

Title Optical diagnostics for thin film processing / Irving P. Herman.

Imprint San Diego, Calif. : Academic Press, c1996.

Copies

Location Call No. OPAC Message Status
 Axe 2nd Floor Stacks  621.38152 H426o    ---  Available
Description xxix, 783 p. : ill. ; 24 cm.
Bibliography Includes bibliographical references and index.
Subject Thin films -- Surfaces.
Spectrum analysis -- Industrial applications.
ISBN 0123420709 (acid-free paper)

 
    
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