Ion beam modification of materials : proceedings of the ninth International Conference on Ion Beam Modification of Materials, Canberra, Australia, 5-10 February, 1995 / editors, J.S. Williams, R.G. Elliman, M.C. Ridgway.
pt. I, section I. Basic processes ; section II. Low energy processes ; section III. Defect formation and annealing of semiconductors ; section IV. Semiconductor processing, devices and optical materials ; section V. Modification of non-semiconductor materials ; section VI. Novel processing : applications and techniques -- pt. II, section A. Basic processes ; section B. Low-energy processes ; section C. Defect formation and annealing of semiconductors ; section D. Semiconductor processing, devices and optical materials ; section E. Modification of non-semiconductor materials ; section F. Novel processing : applications and techniques.
