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International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium)

Title Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.

Publication Info.	Pfaffikon, Switzerland : TTP, 2014.
	Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]
	2014

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Available to Pittsburg State University patrons only.

Copies

Location	Call No.	OPAC Message	Status
Axe ProQuest E-Book	Electronic Book	---	Available

Description	1 online resource (331 pages) : illustrations.
	text rdacontent
	computer rdamedia
	online resource rdacarrier
Series	Solid State Phenomena, 1662-7799 ; Volume 219
	Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219.
Bibliography	Includes bibliographical references at the end of each chapters and index.
Note	Description based on online resource; title from PDF title page (ebrary, viewed October 16, 2014).
Subject	Semiconductors -- Congresses.
Genre/Form	Electronic books.
Added Author	Mertens, Paul, editor.
	Meuris, Marc, editor.
	Heyns, Marc, editor.
Other Form:	Print version: International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium) Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium. Pfaffikon, Switzerland : TTP, c2014 333 pages Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219. 9783038352426
ISBN	9783038352426
	9783038266266 (electronic bk.)