| Description |
xxv, 377 p. : ill. (some col.) |
| Note |
Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| Bibliography |
Includes bibliographical references and index. |
| Summary |
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher. |
| Reproduction |
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. |
| Subject |
Microlithography.
|
| Genre/Form |
Electronic books.
|
| Added Author |
Landis, Stefan.
|
|
ProQuest (Firm)
|
| ISBN |
9781848212022 (hardback) |
|
184821202X (hardback) |
|
9781118621233 (electronic bk.) |
|
