Description |
xxv, 377 p. : ill. (some col.) |
Note |
Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
Bibliography |
Includes bibliographical references and index. |
Summary |
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher. |
Reproduction |
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. |
Subject |
Microlithography.
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Genre/Form |
Electronic books.
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Added Author |
Landis, Stefan.
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|
ProQuest (Firm)
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ISBN |
9781848212022 (hardback) |
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184821202X (hardback) |
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9781118621233 (electronic bk.) |
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