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Author

Title Environmental technology initiative--chemical-free cleaning of semiconductors by the radiance process [electronic resource] / by Ronald N. Legge...[et al.].

Imprint

[Cincinnati, OH] : U.S. Environmental Protection Agency, Office of Research and Development, National Risk Management Research Laboratory, [1998]

Connect to
Connect to https://permanent.fdlp.gov/websites/epagov/www.epa.gov/ORD/WebPubs/process/600r98153.pdf

Location	Call No.	OPAC Message	Status
Axe Federal Documents Online	EP 11.2:2003020162	---	Available

System Details	System requirements: Adobe Acrobat Reader required.
	Mode of access via the EPA Office of Research and Development web site.
Note	Title from title screen (viewed on Sept. 22, 2003).
	"September 1998."
	"EPA/600/R-98/153."
Bibliography	Includes bibliographical references.
Subject	Semiconductors -- Cleaning -- Technological innovations -- United States.
Added Author	National Risk Management Research Laboratory (U.S.)
Gpo Item No.	0431-Y (online)
Sudoc No.	EP 11.2:2003020162