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Title MEMS Materials and Processes Handbook / edited by Reza Ghodssi, Pinyen Lin.

Publication Info. Boston, MA : Springer US : Imprint : Springer, 2011.


Location Call No. OPAC Message Status
 Axe Books 24x7 Engineering E-Book  Electronic Book    ---  Available
Description 1 online resource (XXXVI, 1188 pages 200 illustrations) : online resource.
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
text file PDF rda
Series MEMS Reference Shelf, 1936-4407 ; 1
MEMS reference shelf ; 1. 1936-4407
Bibliography Includes bibliographical references and index.
Contents The MEMS design process -- Additive processes for semiconductors and dielectric materials -- Additive processes for metals -- Additive processes for polymeric materials -- Additive processes for piezoelectric materials : piezoelectric MEMS -- Materials and processes in shape memory alloy -- Dry etching for micromachining applications -- MEMS wet-etch processes and procedures -- MEMS lithography and micromachining techniques -- Doping processes for MEMS -- Wafer bonding -- MEMS packaging materials -- Surface treatment and planarization -- MEMS process integration.
Subject Engineering.
Electronic circuits.
Materials science.
Surfaces (Technology)
Thin films.
Electronics and Microelectronics, Instrumentation.
Materials Science, general.
Circuits and Systems.
Surfaces and Interfaces, Thin Films.
Microelectromechanical systems. (OCoLC)fst01019745
Microelectromechanical systems -- Materials. (OCoLC)fst01019748
Added Author Ghodssi, Reza, editor.
Lin, Pinyen, editor.
Added Title Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied
Other Form: Print version: MEMS Materials and Processes Handbook. Boston, MA : Springer US : Imprint : Springer, 2011 (DLC) 2011921730
ISBN 9780387473185
0387473165 (hbk.)
9780387473161 (hbk.)
Standard No. 10.1007/978-0-387-47318-5 doi

Available items only