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Author
Mack, Chris A.
Title
Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
Imprint
Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007.
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Available to Pittsburg State University patrons only.
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Status
Axe ProQuest E-Book
Electronic Book
---
Available
Description
xvii, 515 p. : ill.
Bibliography
Includes bibliographical references and index.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject
Integrated circuits -- Design and construction.
Microlithography -- Industrial applications.
Genre/Form
Electronic books.
Added Author
ProQuest (Firm)
ISBN
9780470018934
0470018933
9780470727300 (pbk.)
0470727306 (pbk.)
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