| Description |
1 online resource (xv, 348 pages) : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
| Series |
Materials science and process technology series |
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Materials science and process technology series.
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| Summary |
This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry. |
| Bibliography |
Includes bibliographical references and index. |
| Note |
Print version record. |
| Contents |
Introduction -- Industrial Hygiene Monitoring -- Industrial Hygiene Monitoring: Physical Agents -- Ventilation -- Personal Protective Equipment (PPE) -- Indoor Air Quality (IAQ) -- Ergonomics -- Industrial Hygiene Recordkeeping -- Plan Review -- Appendix A: Silicon Ingot and Wafer Manufacturing -- Appendix B: Silicon Device Manufacturing Introduction -- Appendix C: III-V (GaAs) -- Appendix D: III-V Device: Microwave IC -- Appendix E: Ion Implanter Maintenance Safety Considerations -- Appendix F: Bibliography -- Glossary and Acronyms -- Index. |
| Access |
Use copy Restrictions unspecified star MiAaHDL |
| Reproduction |
Electronic reproduction. [Place of publication not identified] : HathiTrust Digital Library, 2010. MiAaHDL |
| System Details |
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL |
| Processing Action |
digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL |
| Subject |
Semiconductor industry -- Employees -- Health and hygiene.
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Industrial hygiene.
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Semi-conducteurs -- Industrie -- Personnel -- Santé et hygiène.
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Industrial hygiene
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Semiconductor industry -- Employees -- Health and hygiene
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| Genre/Form |
Handbook |
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handbooks.
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Handbooks and manuals
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Handbooks and manuals.
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Guides et manuels.
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| Added Author |
Baldwin, David G.
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Manz, Paul C.
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| Other Form: |
Print version: Williams, Michael E. Semiconductor industrial hygiene handbook. Park Ridge, N.J., U.S.A. : Noyes Publications, ©1995 0815513690 (DLC) 94031248 (OCoLC)31044757 |
| ISBN |
1591241448 (electronic bk.) |
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9781591241447 (electronic bk.) |
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9780815513698 |
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0815513690 |
| Standard No. |
(WaSeSS)ssj0000072954 |
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AU@ 000025336993 |
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CHNEW 001004474 |
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DEBBG BV039832739 |
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DEBBG BV042315376 |
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DEBSZ 338255435 |
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DEBSZ 405320930 |
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GBVCP 878882804 |
|
NZ1 10240161 |
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NZ1 14675020 |
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NZ1 15177241 |
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NZ1 15627158 |
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