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Title Advances in CMP/polishing technologies for the manufacture of electronic devices [electronic resource] / [edited by] Toshiro Doi, Ioan D. Marinescu, Syuhei Kurokawa.

Imprint Kidlington, Oxford, U.K. ; Waltham, Mass. : William Andrew, 2012 (Norwood, Mass. : Books24x7.com [generator])

Copies

Location Call No. OPAC Message Status
 Axe Engineering Pro E-Book  Electronic Book    ---  Available
Edition 1st ed.
System Details Mode of access: Internet via World Wide Web.
Note Title from title screen.
File Type Text.
Issued By Digitized and made available by: Books24x7.com.
Form Available also in a print ed.
Bibliography Includes bibliographical references and index.
Subject Grinding and polishing.
Chemical mechanical planarization.
Electrolytic polishing.
Genre/Form Electronic books.
Added Author Doi, Toshiro K., 1947- Editor.
Marinescu, Ioan D. Editor.
Kurokawa, Syuhei. Editor.
Books24x7, Inc.
Added Title Advances in CMP polishing technologies for the manufacture of electronic devices
CMP polishing technologies for the manufacture of electronic devices
ISBN 9781437778595
1437778593

 
    
Available items only