| Description |
1 online resource (viii, 268 pages) : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
| Series |
Handbook of sensors and actuators ; v. 6 |
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Handbook of sensors and actuators ; v. 6.
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| Bibliography |
Includes bibliographical references. |
| Note |
Print version record. |
| Summary |
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. |
| Contents |
Front Cover; Micro Mechanical Systems: Principles and Technology; Copyright Page; Contents; Chapter 1. Introduction; Historical Background and Parallels to Microelectronics; The Motivation for Microsystem Technology; Microphysics and Design Considerations; From the Microcomponent to the Microsystem; Chapter 2. Photolithographic Microfabrication; Basic Concepts of Planar Processing; Materials; Unit Processes; Integrated Processes; Limitations of Planar Processes; Chapter 3. Micromachining by Machine Tools; Historical Aspects; Basics of Micromachine Tools; Microtool Preparation. |
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Wire Electrodischarge Grinding (WEDG)Micro EDM; Micro Mechanical Machining (MMM); Combined Method for Micromachining; Chapter 4. Tribological Aspects of Microsystems; Introduction; Tribology -- Friction, Lubrication and Wear; Surface Structure and Tribilogical Contact; Friction and Wear; Materials for Reliable Micromechanical Systems; Chapter 5. Silicon Microsensors; Introduction; Fabrication; Performance of Micromechanical Sensors; Examples of Micromechanical Sensors; Chapter 6. Micro-Actuators for Micro-Robots: Electric and Magnetic; Introduction; Electric Field Driven Actuators. |
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Piezoelectric ActuatorsMechanical Transformers; Magnetic Field Driven Actuators; Chapter 7. Energy Source and Power Supply Method; Classification of Energy Supply Methods; Internal Supply Methods; External Supply Methods and Noncontact Manipulation; The Others; Chapter 8. Control Method of Micro Mechanical Systems; Control Principle; Scaling Effects; Intelligent Control; Man-Machine Interface; Chapter 9. Examples of Microsystems; Introduction; Examples of Microsystems; Examples of Micromachines; Chapter 10. Future Problems; The Complete Microsystem. |
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The Industrial Potential of Microsystem TechnologyThe Importance of Standardization; Outlook. |
| Language |
English. |
| Subject |
Microelectromechanical systems -- Handbooks, manuals, etc.
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Microsystèmes électromécaniques -- Guides, manuels, etc.
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TECHNOLOGY & ENGINEERING -- Mechanical.
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Microelectromechanical systems
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Mikromechanik
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Mikrosystemtechnik
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Tecnologia.
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Engenharia eletrônica.
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Microactionneurs.
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Microtechniques.
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Micromécanique (ingénierie)
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| Genre/Form |
Handbook |
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handbooks.
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Handbooks and manuals
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Handbooks and manuals.
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Guides et manuels.
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| Added Author |
Fukuda, T. (Toshio), 1948-
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Menz, W. (Wolfgang)
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| Other Form: |
Print version: Micro mechanical systems. Amsterdam ; New York : Elsevier, 1998 9780444823632 (DLC) 98020529 (OCoLC)39122892 |
| ISBN |
9780080536545 (electronic bk.) |
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0080536549 (electronic bk.) |
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9780444823632 |
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0444823638 |
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1282284975 |
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9781282284975 |
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9786612284977 |
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6612284978 |
| Standard No. |
AU@ 000042523431 |
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CHNEW 001007368 |
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DEBBG BV039831027 |
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DEBBG BV042316109 |
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DEBSZ 405310641 |
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DEBSZ 482357851 |
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NZ1 11602256 |
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NZ1 14676244 |
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NZ1 15191198 |
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NZ1 15594857 |
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UKMGB 017548825 |
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