Kids Library Home

Welcome to the Kids' Library!

Search for books, movies, music, magazines, and more.

     
Available items only
E-Books/E-Docs
Conference International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium)

Title Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.

Publication Info. Pfaffikon, Switzerland : TTP, 2014.
Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]
2014

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description 1 online resource (331 pages) : illustrations.
text rdacontent
computer rdamedia
online resource rdacarrier
Series Solid State Phenomena, 1662-7799 ; Volume 219
Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219.
Bibliography Includes bibliographical references at the end of each chapters and index.
Note Description based on online resource; title from PDF title page (ebrary, viewed October 16, 2014).
Subject Semiconductors -- Congresses.
Genre/Form Electronic books.
Added Author Mertens, Paul, editor.
Meuris, Marc, editor.
Heyns, Marc, editor.
Other Form: Print version: International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium) Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium. Pfaffikon, Switzerland : TTP, c2014 333 pages Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219. 1662-7799 9783038352426
ISBN 9783038352426
9783038266266 (e-book)

 
    
Available items only