Kids Library Home

Welcome to the Kids' Library!

Search for books, movies, music, magazines, and more.

     
Available items only
Electronic Book
Conference International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium)

Title Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.

Publication Info. Pfaffikon, Switzerland : TTP, 2014.
Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]
2014

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description 1 online resource (331 pages) : illustrations.
text rdacontent
computer rdamedia
online resource rdacarrier
Series Solid State Phenomena, 1662-7799 ; Volume 219
Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219.
Bibliography Includes bibliographical references at the end of each chapters and index.
Note Description based on online resource; title from PDF title page (ebrary, viewed October 16, 2014).
Subject Semiconductors -- Congresses.
Genre/Form Electronic books.
Added Author Mertens, Paul, editor.
Meuris, Marc, editor.
Heyns, Marc, editor.
Other Form: Print version: International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium) Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium. Pfaffikon, Switzerland : TTP, c2014 333 pages Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219. 9783038352426
ISBN 9783038352426
9783038266266 (electronic bk.)

 
    
Available items only