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Title Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California / Orest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society.

Imprint

Bellingham, Wash. : The Society, c1988.

Location	Call No.	OPAC Message	Status
Axe 2nd Floor Stacks	621.38152 Sp31	---	Available

Description	viii, 234 p. : ill. ; 28 cm.
Series	Proceedings of SPIE--the International Society for Optical Engineering ; v. 946
Bibliography	Includes bibliographical references and index.
Subject	Semiconductors -- Testing -- Congresses.
	Spectrum analysis -- Congresses.
Added Author	Glembocki, O. J.
	Pollak, Fred H.
	Ponce, Fernando.
	Optical Society of America.
	Society of Photo-optical Instrumentation Engineers.
	Metallurgical Society (U.S.)
ISBN	0892529814 (pbk.)