| Description |
1 online resource (xxv, 965 pages) : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
| Bibliography |
Includes bibliographical references and index. |
| Contents |
Introduction -- Microtransducer Operation -- Material Properties: Measurement and Data -- MEMS and MEMS Simulation -- System-Level Simulation of Microsystems -- Thermal Based Sensors -- Photon Detectors -- Free-Space Optical MEMS -- Integrated Micro-Optics -- Magnetic Microsensors -- Mechanical Microsensors -- Semiconductor-Based Chemical Microsensors -- Microfluidics -- Biomedical Microsystems -- Microactuators -- Micromachining Technology -- Interface Circuitry and Microsystems -- Index. |
| Summary |
Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for "smaller, better, cheaper, and faster?" If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness |
| Subject |
Microelectromechanical systems.
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Micro-Electrical-Mechanical Systems |
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Microsystèmes électromécaniques.
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TECHNOLOGY & ENGINEERING -- Mechanical.
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Ingénierie.
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Microelectromechanical systems
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MEMS
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| Added Author |
Korvink, J. G. (Jan G.)
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Paul, Oliver.
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| Other Form: |
Print version: MEMS. Norwich, NY : William Andrew Pub. ; Heidelberg, Germany : Springer, ©2006 0815514972 9780815514978 (DLC) 2005023492 (OCoLC)61362695 |
| ISBN |
0815514972 (William Andrew ; alk. paper) |
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9780815514978 (William Andrew ; alk. paper) |
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3540211179 (Springer-Verlag) |
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9783540211174 (Springer-Verlag) |
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9780815518259 (electronic bk.) |
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0815518250 (electronic bk.) |
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9783540336556 |
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3540336559 |
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9780815518280 |
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0815518285 |
| Standard No. |
AU@ 000028301884 |
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AU@ 000055628601 |
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CHNEW 001007963 |
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DEBBG BV041120065 |
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DEBBG BV042316144 |
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DEBSZ 275225518 |
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DEBSZ 380191733 |
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DEBSZ 396679552 |
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DEBSZ 430906471 |
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GBVCP 785366555 |
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NZ1 10988413 |
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NZ1 13532275 |
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