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Title
Chemical physics of thin film deposition processes for micro- and nano-technologies / edited by Yves Pauleau.
Imprint
Dordrecht ; Boston : Kluwer Academic Publishers, c2002.
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Call No.
OPAC Message
Status
Axe 2nd Floor Stacks
621.38152 C42 2002
---
Available
Description
xiii, 363 p. : ill. ; 25 cm.
Series
NATO science series. Series II, Mathematics, physics, and chemistry ; v. 55
Note
"Published in cooperation with NATO Scientific Affairs Division."
Bibliography
Includes bibliographical references and index.
Subject
Thin films.
Nanotechnology.
Added Author
Pauleau, Y.
ISBN
1402005253 (pbk. : alk. paper)
1402005245 (alk. paper)
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