| Description |
1 online resource (xiii, 419 pages) : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
| Series |
Thin films ; v. 26 |
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Thin films (San Diego, Calif.) ; v. 26.
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| Summary |
GENERAL DESCRIPTION OF THE SERIES Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films. GENERAL DESCRIPTION OF THE VOLUME This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts. |
| Contents |
Useful Conversion Factors and Constants. Introduction. Physics of Sputtering. Plasma Systems. The Planar Magnetron. Sputtering Tools. Directional Deposition. Planarized PVD: Use of Elevated Temperature and/or High Pressure. Ionized Magnetron Sputter Deposition. PVD Materials and Processes. Process Modeling for Magnetron Deposition. Sputtering Targets. Index. |
| Bibliography |
Includes bibliographical references and indexes. |
| Note |
Print version record. |
| Language |
English. |
| Subject |
Thin film devices -- Design and construction.
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Vapor-plating.
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Thin films.
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Couches minces.
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TECHNOLOGY & ENGINEERING -- Electronics -- Solid State.
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TECHNOLOGY & ENGINEERING -- Electronics -- Semiconductors.
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Thin film devices -- Design and construction
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Thin films
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Vapor-plating
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Física geral.
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| Added Author |
Rossnagel, Stephen M.
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| Other Form: |
Print version: Powell, Ronald A. PVD for microelectronics. San Diego : Academic Press, ©1999 012533026X 9780125330268 (DLC) 98028495 (OCoLC)39275876 |
| ISBN |
9780125330268 |
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012533026X |
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9780080542928 |
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0080542921 |
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1281054887 |
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9781281054883 |
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9786611054885 |
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661105488X |
| Standard No. |
AU@ 000056658911 |
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DEBBG BV039832484 |
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DEBBG BV042316979 |
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DEBSZ 367774321 |
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DEBSZ 482350415 |
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NZ1 12432388 |
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NZ1 15192661 |
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