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Title Nanofabrication using focused ion and electron beams [electronic resource] : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

Imprint Oxford ; New York : Oxford University Press, 2011.

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description xvi, 813 p.
Series Nanomanufacturing series ; v. 1
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject Nanostructured materials.
Nanotechnology.
Electron beams -- Industrial applications.
Ion bombardment -- Industrial applications.
Genre/Form Electronic books.
Added Author Utke, Ivo.
Moshkalev, Stanislav.
Russell, Phillip, 1955-
ProQuest (Firm)
ISBN 9780199734214
9780199920990

 
    
Available items only