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Author
Sarkar, Jaydeep.
Title
Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar.
Publication Info.
Oxford ; Boston : William Andrew Publishing, 2014.
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Available to Pittsburg State University patrons only.
Copies
Location
Call No.
OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Edition
First edition.
Description
1 online resource (614 pages) : illustrations
text rdacontent
computer rdamedia
online resource rdacarrier
Bibliography
Includes bibliographical references and index.
Note
Description based on print version record.
Subject
Microelectronics -- Materials.
Flat panel displays -- Materials.
Sputtering (Physics)
Genre/Form
Electronic books.
Other Form:
Print version: Sarkar, Jaydeep. Sputtering materials for VLSI and thin film devices. Oxford : William Andrew Publishing, 2014 x, 603 pages : illustrations ; 24 cm. 9780815515937
ISBN
9780815515937 (hbk.)
9780815519874 (electronic bk.)
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