| Description |
1 online resource (xiv, 444 pages) : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
| Summary |
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package. * Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume * written by renowned experts in the field * Provides an up-to-date starting point in this young research field. |
| Contents |
Dialectric Properties, Characterization of Low Dielectric Constant Materials, Compatibilities of Dielectric Film, Silicon Based Dielectrics, Low K Polymers, Chemical Vapour Deposition of CF Low K Materials, Nanoporous Dielectric Films: Fundamental Property Relations and Microelectronic Applications, High K Dielectrics Grown by Atomic Layer Disposition, Dielectric Materials in Optical Waveguide Applications, Reliability, Future Trends in Silicon Technologies. |
| Bibliography |
Includes bibliographical references (pages 425-427) and index. |
| Note |
Print version record. |
| Subject |
Semiconductor wafers.
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Dielectrics.
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Plaquettes à gravure en semi-conducteurs.
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Diélectriques.
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TECHNOLOGY & ENGINEERING -- Electronics -- Solid State.
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TECHNOLOGY & ENGINEERING -- Electronics -- Semiconductors.
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Dielectrics
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Semiconductor wafers
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| Added Author |
Murarka, S. P.
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Eizenberg, M. (Moshe)
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Sinha, A. K. (Ashok K.)
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| Other Form: |
Print version: Interlayer dielectrics for semiconductor technologies. Amsterdam ; Boston : Elsevier/Academic Press, 2003 0125112211 9780125112215 (OCoLC)54397124 |
| ISBN |
9780125112215 |
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0125112211 |
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9780080521954 (electronic bk.) |
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0080521959 (electronic bk.) |
| Standard No. |
AU@ 000051860354 |
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AU@ 000055709470 |
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AU@ 000056736196 |
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AU@ 000069305043 |
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CHBIS 005664400 |
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CHNEW 001005347 |
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CHVBK 167050648 |
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DEBBG BV039830576 |
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DEBBG BV042315550 |
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DEBSZ 367759829 |
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DEBSZ 430407947 |
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NZ1 12434093 |
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