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Author
Smith, Donald L. (Donald Leonard), 1944-
Title
Thin-film deposition : principles and practice / Donald L. Smith.
Imprint
New York, N.Y. : McGraw-Hill, c1995.
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Axe 2nd Floor Stacks
621.38152 Sm54t
---
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Description
xxiii, 616 p. : ill. ; 24 cm.
Bibliography
Includes bibliographical references and index.
Subject
Thin films.
Vapor-plating.
Thin film devices.
ISBN
0070585024
0071139133 (International ed.)
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