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Author

Steinmann, Pierre A.

Title Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films [electronic resource] / Pierre A. Steinmann and Talivaldis Spalvins.

Imprint

[Washington, D.C.] : National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Division ; Springfield, Va. : For sale by the National Technical Information Service, 1990.

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Connect to http://purl.access.gpo.gov/GPO/LPS68087

Copies

Location	Call No.	OPAC Message	Status
Axe Federal Documents Online	NAS 1.60:2994	---	Available

Description	7 p. : ill. ; 28 cm.
Series	NASA technical paper ; 2994
Note	Shipping list no.: 1990-0871-M.
	Distributed to depository libraries in microfiche.
	Prepared at Lewis Research Center.
	"April 1990."
Form	Mode of access via the NTRS web site.
Bibliography	Bibliography: p. 3.
Subject	Coatings.
	Lubrication and lubricants.
	Molybdenum compounds.
	Sputtering (Physics)
	Deposition.
	Lubricants.
	Magnetron sputtering.
	Morphology.
	Radio frequencies.
	Stoichiometry.
	Thin films.
Added Author	Spalvins, Talivaldis.
	Lewis Research Center.
	United States. National Aeronautics and Space Administration. Scientific and Technical Information Division.
Gpo Item No.	0830-H-15 (online)
Sudoc No.	NAS 1.60:2994