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Authors (1-3 of 3)
Tilli Markku
1
Handbook of silicon based MEMS materials and technologies
Amsterdam, [Netherlands] : William Andrew, 2015. 2015
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Axe ProQuest E-Book
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Handbook of silicon based MEMS materials and technologies
London, UK : William Andrew is an imprint of Elsevier, 2015. 2015
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Axe Elsevier ScienceDirect Ebook
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3
Handbook of silicon based mems materials and technologies
Amsterdam : Elsevier, 2020. 2020
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