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Title Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / edited by Filipe Vaz, Nicolas Martin & Martin Fenker.

Publication Info.	Sharjah, United Arab Emirates ; Oak Park, Illinois : Bentham Science Publishers, [2013]
	2013

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Available to Pittsburg State University patrons only.

Copies

Location	Call No.	OPAC Message	Status
Axe ProQuest E-Book	Electronic Book	---	Available

Description	1 online resource (363 pages)
	text rdacontent
	computer rdamedia
	online resource rdacarrier
Bibliography	Includes bibliographical references and indexes.
Note	Description based on online resource; title from PDF title page (ebrary, viewed September 20, 2013).
Subject	Thin films.
	Metals.
Genre/Form	Electronic books.
Added Author	Vaz, Filipe.
	Martin, Nicolas.
	Fenker, Martin.
ISBN	9781608051564 (e-book)
	9781608051571