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Author
Maluf, Nadim.
Title
An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams.
Imprint
Boston : Artech House, 2004.
Connect to
Available to Pittsburg State University patrons only.
Copies
Location
Call No.
OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Edition
2nd ed.
Description
xx, 282 p. : ill.
Series
Artech House microelectromechanical systems (MEMS) series
Microelectromechanical systems series.
Bibliography
Includes bibliographical references and index.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject
Microelectromechanical systems.
Microtechnology.
Genre/Form
Electronic books.
Added Author
Williams, Kirt.
ProQuest (Firm)
ISBN
1580535917
1580535909 (alk. paper)
Available items only
