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Title
Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
Imprint
Washington, DC : American Chemical Society, 1994.
Copies
Location
Call No.
OPAC Message
Status
Axe 2nd Floor Stacks
621.381531 In8, 1994
---
Available
Edition
2nd ed.
Description
xiv, 527 p. : ill. ; 24 cm.
Series
ACS professional reference book
Bibliography
Includes bibliographical references and index.
Contents
An introduction to lithography / L. F. Thompson -- The lithographic process / M. J. Bowden -- Organic resist materials / C. G. Willson -- Resist processing / L. Thompson -- Plasma etching / J. A. Mucha, D. W. Hess, and E. S. Aydil --
Subject
Microlithography.
Photoresists.
Plasma etching.
Semiconductors -- Etching.
Added Author
Thompson, L. F., 1944-
Willson, C. G. (C. Grant), 1939-
Bowden, M. J., 1943-
ISBN
0841228485 (alk. paper)
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