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Author Zilbauer, Thomas, author.

Title Atomlagenabscheidung von hafniumoxid / Thomas Zilbauer.

Publication Info. Gottingen, [Germany] : Cuvillier Verlag, 2010.
2010

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Edition 1. Auflage.
Description 1 online resource (152 pages) : illustrations (some color)
text rdacontent
computer rdamedia
online resource rdacarrier
Bibliography Includes bibliographical references.
Note Description based on online resource; title from PDF title page (ebrary, viewed October 6, 2017).
Subject Chemical vapor deposition.
Atomic layer deposition.
Hafnium oxide.
Genre/Form Electronic books.
Other Form: Print version: Zilbauer, Thomas. Atomlagenabscheidung von hafniumoxid. 1. Auflage. Gottingen, [Germany] : Cuvillier Verlag, c2010 vii, 150 pages 9783869552705
ISBN 9783869552705
9783736932708 (e-book)

 
    
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