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Title Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.

Imprint Boston : Academic Press, c1989.

Copies

Location Call No. OPAC Message Status
 Axe 2nd Floor Stacks  621.366 L3335    ---  Available
Description xii, 587 p. : ill. ; 24 cm.
Bibliography Includes bibliographies and index.
Subject Lasers -- Industrial applications.
Thin film devices -- Design and construction.
Microlithography.
Added Author Ehrlich, Daniel J.
Tsao, Jeffrey Y.
ISBN 0122334302

 
    
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