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Author
Zhang, Jie, 1963 September 21- author.
Title
Wafer fabrication : automated material handling systems / Jie Zhang [and five others].
Publication Info.
Berlin ; Boston : De Gruyter, [2018]
2018
Connect to
Available to Pittsburg State University patrons only.
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Call No.
OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Description
1 online resource (284 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Note
Includes index.
Description based on print version record.
Subject
Semiconductor wafers -- Automatic control.
Manufacturing processes -- Automatic control.
Genre/Form
Electronic books.
Other Form:
Print version: Zhang, Jie. Wafer fabrication : automated material handling systems. Berlin ; Boston : De Gruyter, c2018 284 pages 9783110486902
ISBN
9783110486902
9783110487473 (electronic bk.)
Available items only
