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Electronic Book
Author Reinhardt, Karen A.

Title Handbook of cleaning for semiconductor manufacturing [electronic resource] : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.

Imprint Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., c2011.

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description xxii, 590 p. : ill.
Bibliography Includes bibliographical references and index.
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject Semiconductors -- Surfaces -- Cleaning.
Surface preparation.
Genre/Form Electronic books.
Added Author Reidy, Richard F., 1960-
ProQuest (Firm)
ISBN 0470625953
1118071743
9780470625958
9781118071731
9781118071748

 
    
Available items only