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Title Handbook of ellipsometry / edited by Harland G. Tompkins and Eugene A. Irene.

Imprint Norwich, NY : William Andrew Pub. ; Heidelberg, Germany : Springer, ©2005.


Location Call No. OPAC Message Status
 Axe Elsevier ScienceDirect Ebook  Electronic Book    ---  Available
Description 1 online resource (xvi, 870 pages) : illustrations
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Bibliography Includes bibliographical references and index.
Contents PART 1: THEORY OF ELLIPSOMETRY -- Polarized Light and Ellipsometry -- Optical Physics of Materials -- Data Analysis for Spectroscopic Ellipsometry -- PART 2: INSTRUMENTATION -- Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer -- Rotating Polarizer and Analyzer Ellipsometry -- Polarization Modulation Ellipsometry -- Multichannel Ellipsometry -- PART 3: APPLICATIONS -- SiO2 Films -- Theory and Application of Generalized Ellipsometry -- PART 4: EMERGING AREAS -- VUV Ellipsometry -- Spectroscopic Infrared Ellipsometry -- Ellipsometry in Life Sciences -- Index.
Summary The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Subject Ellipsometry.
SCIENCE -- Nanoscience.
Ellipsometry. (OCoLC)fst00908169
Added Author Tompkins, Harland G.
Irene, Eugene A.
Other Form: Print version: Handbook of ellipsometry. Norwich, NY : William Andrew Pub. ; Heidelberg, Germany : Springer, ©2005 0815514999 (DLC) 2004014676 (OCoLC)55887386
ISBN 0815514999 (Andrew ; acid-free paper)
9780815514992 (Andrew ; acid-free paper)
3540222936 (Springer ; acid-free paper)
9783540222934 (Springer ; acid-free paper)
1591248493 (electronic bk.)
9781591248491 (electronic bk.)
9780815517467 (electronic bk.)
0815517467 (electronic bk.)
Standard No. (WaSeSS)ssj0000072170
AU@ 000040151984
CHNEW 001007962
DEBBG BV039828142
DEBBG BV042304520
DEBSZ 338255745
DEBSZ 400947528
GBVCP 802786456
NZ1 10619300
NZ1 14231853
NZ1 15188518

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