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Author
Ma, Xu, 1983-
Title
Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce.
Imprint
Oxford : Wiley-Blackwell, 2010.
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Available to Pittsburg State University patrons only.
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Status
Axe ProQuest E-Book
Electronic Book
---
Available
Description
xv, 226 p. : ill.
Series
Wiley series in pure and applied optics
Wiley series in pure and applied optics.
Bibliography
Includes bibliographical references and index.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject
Microlithography -- Mathematics.
Integrated circuits -- Design and construction -- Mathematics.
Photolithography -- Mathematics.
Semiconductors -- Etching -- Mathematics.
Resolution (Optics)
Genre/Form
Electronic books.
Added Author
Arce, Gonzalo R.
ProQuest (Firm)
ISBN
9780470596975
047059697X
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