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Author Ma, Xu, 1983-

Title Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce.

Imprint Oxford : Wiley-Blackwell, 2010.


Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Description xv, 226 p. : ill.
Series Wiley series in pure and applied optics
Wiley series in pure and applied optics.
Bibliography Includes bibliographical references and index.
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject Microlithography -- Mathematics.
Integrated circuits -- Design and construction -- Mathematics.
Photolithography -- Mathematics.
Semiconductors -- Etching -- Mathematics.
Resolution (Optics)
Genre/Form Electronic books.
Added Author Arce, Gonzalo R.
ProQuest (Firm)
ISBN 9780470596975

Available items only