| Description |
1 online resource (xxiv, 610 pages) : illustrations |
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text txt rdacontent |
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computer c rdamedia |
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online resource cr rdacarrier |
| Series |
Semiconductor safety series |
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Semiconductor safety series.
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| Bibliography |
Includes bibliographical references and index. |
| Summary |
The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH & S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH & S in the semiconductor industry. |
| Note |
Print version record. |
| Contents |
Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies -- Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention -- Chemical Hazards in Semiconductor Operations -- Industrial Hygiene -- Electrical Hazards -- Radiation Safety -- Recognition, Evaluation and Control of Some Plasma Processing Hazards -- Fire Protection Technology for Semiconductor Operations -- Building and Fire Codes Impacting the Semiconductor Industry -- Gases and Gas Equipment -- Toxic Gas Monitoring -- References -- Index. |
| Access |
Use copy Restrictions unspecified star MiAaHDL |
| Reproduction |
Electronic reproduction. [Place of publication not identified] : HathiTrust Digital Library, 2010. MiAaHDL |
| System Details |
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL |
| Processing Action |
digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL |
| Subject |
Semiconductor industry -- United States -- Safety measures.
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Integrated circuits -- Design and construction -- Safety measures.
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Semi-conducteurs -- Industrie -- États-Unis -- Sécurité -- Mesures.
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Circuits intégrés -- Conception et construction -- Sécurité -- Mesures.
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Integrated circuits -- Design and construction -- Safety measures
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Semiconductor industry -- Safety measures
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United States https://id.oclc.org/worldcat/entity/E39PBJtxgQXMWqmjMjjwXRHgrq
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| Added Author |
Bolmen, Richard A.
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| Other Form: |
Print version: Semiconductor safety handbook. Westwood, N.J. : Noyes Publications, ©1998 0815514182 (DLC) 97024032 |
| ISBN |
1591241510 (electronic bk.) |
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9781591241515 (electronic bk.) |
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9780080946542 (electronic bk.) |
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0080946542 (electronic bk.) |
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9780815514183 |
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0815514182 |
| Standard No. |
(WaSeSS)ssj0000072956 |
|
AU@ 000025336994 |
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AU@ 000051524884 |
|
CHNEW 001004475 |
|
DEBBG BV039832752 |
|
DEBBG BV042315377 |
|
DEBSZ 338255443 |
|
DEBSZ 405321244 |
|
GBVCP 87888291X |
|
NZ1 10240162 |
|
NZ1 14675019 |
|
NZ1 15177243 |
|
NZ1 15627159 |
|
NZ1 16094399 |
|
