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Subjects (1-8 of 8)
Microelectromechanical Systems Design And Construction
1
E-Books/E-Docs
 

Ceramic thick films for MEMS and microdevices


Dorey, Robert.
Waltham [Mass.] : William Andrew, c2012 (Norwood, Mass. : Books24x7.com [generator]) 2012

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2
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Fabrication and design of resonant microdevices


Bahreyni, Behraad.
Norwich, NY : William Andrew Inc., c2008 (Norwood, Mass. : Books24x7.com [generator]) 2008

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3
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Handbook of wafer bonding



Weinheim, Germany : Wiley-VCH, 2012. 2012

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4
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Inkjet-based micromanufacturing



Weinheim, Germany : Wiley-VCH, c2012. 2012

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5
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Materials and failures in MEMS and NEMS



Salem, Massachusetts ; Hoboken, New Jersey : Scrivener Publishing : Wiley, 2015. 2015

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6
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Mechanical Design of Microresonators : Modeling and Applications


Lobontiu, Nicolae, author.
[Place of publication not identified] : McGraw-Hill, 2006. 2006

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7
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Microelectromechanical systems advanced materials and fabrication methods


National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
Washington, DC : National Academy Press, 1997. 1997

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8
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Resonant MEMS : fundamentals, implementation and application



Weinheim, Baden-Württemberg, Germany : Wiley-VCH, 2015. 2015

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