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Electronic Book

Title Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].

Publication Info. Amsterdam, [Netherlands] : William Andrew, 2015.
2015

Copies

Location Call No. OPAC Message Status
 Axe ProQuest E-Book  Electronic Book    ---  Available
Edition Second edition.
Description 1 online resource (827 pages) : illustrations (some color), photographs.
text rdacontent
computer rdamedia
online resource rdacarrier
Series Micro & Nano Technologies Series
Micro & nano technologies.
Bibliography Includes bibliographical references at the end of each chapters and index.
Note Description based on print version record.
Subject Microelectromechanical systems.
Microelectromechanical systems -- Materials.
Silicon -- Electric properties.
Genre/Form Electronic books.
Added Author Tilli, Markku, editor.
Aalto, Timo, contributor.
Other Form: Print version: Handbook of silicon based MEMS materials and technologies. Second edition. Amsterdam, [Netherlands] : William Andrew, c2015 xxxvii, 787 pages Micro & nano technologies. 9780323299657 2015937707
ISBN 9780323299657
9780323312233 (electronic bk.)

 
    
Available items only