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Record 19 of 61
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Title
Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].
Imprint
Amsterdam ; Boston : William Andrew/Elsevier, 2010.
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Available to Pittsburg State University patrons only.
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OPAC Message
Status
Axe ProQuest E-Book
Electronic Book
---
Available
Edition
1st ed.
Description
xxxii, 636 p. : ill.
Series
Micro & nano technologies
Micro & nano technologies.
Bibliography
Includes bibliographical references and index.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Subject
Microelectromechanical systems.
Microelectromechanical systems -- Materials.
Silicon -- Electric properties.
Genre/Form
Electronic books.
Added Author
Lindroos, Veikko.
ProQuest (Firm)
ISBN
9780815515944 (hbk.)
0815515944 (hbk.)
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