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| Title |
Silicon carbide micro electromechanical systems for harsh environments [electronic resource] / editor Rebecca Cheung. |
|
| Imprint |
London : Imperial College Press, c2006. |
|
| Axe ProQuest E-Book
|
Electronic Book |
--- |
Available |
| Description |
x, 181 p. : ill. |
| Bibliography |
Includes bibliographical references. |
| Reproduction |
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. |
| Subject |
Microelectromechanical systems.
|
|
Silicon carbide.
|
| Genre/Form |
Electronic books.
|
| Added Author |
Cheung, Rebecca.
|
|
ProQuest (Firm)
|
| Added Title |
Silicon carbide microelectromechanical systems for harsh environments |
| ISBN |
9781860946240 |
|
9781860949098 |
|
1860946240 |
|
