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Title MEMS materials and processes handbook [electronic resource] / Reza Ghodssi, Pinyen Lin, editors.

Imprint New York : Springer, c2011 (Norwood, Mass. : [generator])


Location Call No. OPAC Message Status
 Axe Engineering Pro E-Book  Electronic Book    ---  Available
Series MEMS reference shelf
MEMS reference shelf.
System Details Mode of access: Internet via World Wide Web.
Note Title from title screen.
File Type Text.
Issued By Digitized and made available by:
Form Available also in a print ed.
Bibliography Includes bibliographical references and index.
Subject Microelectromechanical systems -- Materials -- Handbooks, manuals, etc.
Microelectromechanical systems -- Handbooks, manuals, etc.
Genre/Form Electronic books.
Added Author Ghodssi, Reza. Editor.
Lin, Pinyen. Editor.
Books24x7, Inc.
ISBN 9780387473161

Available items only