| Edition |
2nd ed. |
| Description |
1 online resource (volumes <1>) |
|
text txt rdacontent |
|
computer c rdamedia |
|
online resource cr rdacarrier |
| Summary |
The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties * Captures the importance of thin films to microelectronic development * Examines the cause / effect relationship of structure on thin film properties. |
| Bibliography |
Includes bibliographical references and indexes. |
| Contents |
v. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films. |
| Note |
Print version record. |
| Subject |
Thin films.
|
|
Microelectronics.
|
|
Miniaturization |
|
Couches minces.
|
|
Microélectronique.
|
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microelectronics.
|
|
Microelectronics
|
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Thin films
|
| Other Form: |
Print version: Machlin, E.S. Materials science in microelectronics. 2nd ed. Amsterdam ; Boston : Elsevier, 2005- 008044640X 9780080446400 (DLC) 2005934958 (OCoLC)63692543 |
| ISBN |
9780080446394 |
|
0080446396 |
|
9780080446400 |
|
008044640X |
|
0080459609 (electronic bk.) |
|
9780080459608 (electronic bk.) |
| Standard No. |
AU@ 000060881916 |
|
CHBIS 005670864 |
|
CHBIS 005670867 |
|
CHVBK 167001310 |
|
CHVBK 167170589 |
|
DEBBG BV039832584 |
|
DEBBG BV039832585 |
|
DEBBG BV042317072 |
|
DEBSZ 405356854 |
|
DEBSZ 405356862 |
|
DEBSZ 434185124 |
|
DEBSZ 434185132 |
|
NZ1 12434764 |
|
NZ1 12434765 |
|
AU@ 000060881953 |
|
